Vacuum coating machine performance

                     

  Analysis of the existing is optical vacuum coating machine piece structure problems existing in the using process. According to the development trend of modern optical vacuum coating machine and problems needed to resolve in the process of production, through various analysis, optimal design of a new generation of coating machine to compare structure, solve the influence the quality of optical thin film and ultra precision optical multilayer film plating system problems, in order to improve the monitoring precision of thin film, realize the automatic control system, improve the efficiency of optical vacuum coating machine production, reduce the production cost. The structure of the modern optical vacuum coating machine configuration and the use effect is the best.
 Since the 1980 s, global photoelectric science and technology development and progress rapidly, the optical vacuum coating machine equipment research and development in our country, on the basis of the introduction of digestion and absorption, also developed rapidly. In recent 20 years, our country has gradually become the global optical products processing base, as the key working procedure, optical products, coating and final procedure, demand is higher and higher, vacuum coating machine performance and configuration must be strengthened, and also improve the quality of equipment, improve equipment performance, improve production efficiency and other issues are evident, that has implications for such equipment modification, design, research and development, the relevant technical personnel to solve.
 Vacuum coating machine to compare piece structure of this kind of equipment is the indispensable key components, the configuration of the high-end equipment on comparative institutional demand is higher and higher, vacuum technology net think it more film of plating layer testing and production efficiency has an important irreplaceable role. Here are vacuum coating machine is piece of agency problems in use, and optimize the innovation design of structure were analyzed.
1, the current vacuum coating machine are institutions
General coating machine more structure
Domestic low vacuum coating machine, from the beginning of development to the nearly 10 years or so, most still use the comparison of structure, as shown in figure 1. This transposition is institution, usually by the diameter of the six independent Φ comparison pieces of 22 mm, as shown in figure 1 (b). The agency is mainly composed of a tray of 16, 110 and three support bar one more piece of plate of 18, as shown in figure 1 (a), three 110 16 for tray fixed support bar, supporting role, compare reel 18 on the gear mesh motion input rotary dial the piece, can finish the beginning three coordinate transposition. As a result of the general coating machine vacuum chamber diameter size is not large, the diameter of the institution (124 mm) Φ compared to some large, result in artifacts plate can be loaded plating workpiece area is relatively small, and it can be placed only six more pieces of 13, directly affect the production efficiency.
The structure features are: simple structure, convenient processing and manufacturing, installation is convenient and easy. Weakness: the diameter of this structure is larger, the number of impact load artifacts; Price comparison sheet placed less quantity, reduces the production efficiency; Strength and stiffness is limited, and because this structure is completely exposed to the vacuum chamber, high temperature vacuum sputtering abrasive, the influence of the rotational stability, flexibility, driving position repeat the consistency of the error is bigger, frequent cleaning maintenance.