2016年3月11日星期五

Vacuum chamber for vacuum coating equipment design?


             
  Vacuum chamber for vacuum coating equipment design? Vacuum coating technology is under vacuum conditions in the physical or chemical method, make the body surface to obtain the required membrane, vacuum coating technology the method according to its different section is divided into evaporation plating, sputtering, ion plating, beam deposition and molecular beam epitaxy, the analysis of the coating using the magnetron sputtering coating equipment.
  Vacuum chamber is a major component parts of the vacuum equipment, vacuum coating equipment is sealing and reliability of the vacuum chamber design main consideration, must be reasonable in structure, material of vacuum equipment production is carried out in the vacuum chamber, the material of vacuum degree, the influence of design cannot careless, attention should be paid to some problems.
 Using vacuum magnetron sputtering coating equipment generally adopts the structure of cylinder body, the structure to ensure the fast time, because of air pocket will slowly deflated, thus avoiding isolation cavity, the top vacuum system will add magnetron sputtering gun, in order to make the vacuum chamber and components have enough strength, ensure that under the action of external and internal do not produce the change of the shape, thickness need enough.
 Vacuum coating machine company, points out that the welding is a key process for production of vacuum chamber, after the guarantee welding the vacuum chamber will not produce air leakage phenomenon, should be reasonable design of welding structure, improve the quality of welding, in ultra high vacuum inner wall roughness of polishing to make outdoor indoor surface is bright and clean, must pay special attention to is to prevent rust.

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