ZGD series vacuum coating machine for Diamond-like carbon

      

Operational principle:
This equipment adopts the vacuum evaporation ion beam technology. This equipment can install two to six different pure metal or alloy target material. This machine coat single layer and multi layer nanometer film. The film layer have the effect of high-performance and super-hard film layer, excellent wear resistance, corrosion resistance and beautification effect. This equipment mainly used in drill bits, milling cutter, core shaft, blades, precision mould, cutting tools industry, etc.
Main feature:
1. plasma source assisted deposition technology, pre-cleaning and the auxiliary deposition to the work piece.
2. Adopt the high power pulse bias power supply, enhance the coating adhesion
3. Adopt multiple sets of twin arc, which can install 2-6 different target materials. Pure metal or alloy composite nano film layer is achieved.
4. The work piece rack adopts rotation and revolution structure, large loading capacity and temperature resistance. The frame can move out of the chamber which is convenient to load heavy molds. The work piece rack can be customized according to customer requirements and adopts inverter to adjust, and infinitely adjustable speed.
5. The touch screen and PLC. This machine can realize automatic control, automatic and manual switch.
Basic outfit:
1. Chamber structure: vertical or horizontal structure ,all stainless steel material , the vacuum chamber effective diameter of 800mm-2000mm, water-cooled double sandwich structure, inside stainless steel plate with a plug-in anti-fouling, easy to clean and operation;
2. Vacuum system: mechanical pumps, rotary vane pumps, roots pumps, molecular pumps, cryogenic pump , vacuum diffusion pump with cold trap, pre-pump is oil-free vacuum pump, with stainless steel pipes and valves;
3. The coating system: using intermediate frequency magnetron sputtering power supply from one set to four sets. Equipped with 1-2sets of the unbalanced magnetron target, 6-14 sets hot cathode arc, the arc power supply, DC superposition pulsed bias power supply, the international leading level of arc source and anode layer ion source. Equipped with 1-2 sets ionization source from the United States;
4. The inflation system: automatic gas meter and flow display control;
5. Control system: color touch screen, PLC, automatic and manual control can be converted any time; real-time display detailed parameters, automatic control the entire production process, automatic storage process parameters. The main electrical components Schneider and other famous brands;
6. Security system: Set abnormal sound and light alarm devices for water, electricity, gas,  perform the appropriate protection procedures
7. Heating and baking system: stainless steel tubular heating element, substrate temperature up to 180 degrees, the temperature control using the Japanese conductivity meter, temperature control accuracy of ± 1 ° C;
8. film thickness control: quartz crystal thickness monitoring system can control the electron gun evaporation rate, precise control of film thickness, manual and automatic easy switching.
9. Control systems: real-time display detailed parameters, automatic control the entire production process, and automatic storage process parameters.